A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor

Yan Li, Hao Li, Yifeng Xiao, Le Cao, Zhanshe Guo. A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor. Sensors, 21(7):2545, 2021. [doi]

@article{LiLXCG21,
  title = {A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor},
  author = {Yan Li and Hao Li and Yifeng Xiao and Le Cao and Zhanshe Guo},
  year = {2021},
  doi = {10.3390/s21072545},
  url = {https://doi.org/10.3390/s21072545},
  researchr = {https://researchr.org/publication/LiLXCG21},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {21},
  number = {7},
  pages = {2545},
}