A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor

Yan Li, Hao Li, Yifeng Xiao, Le Cao, Zhanshe Guo. A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor. Sensors, 21(7):2545, 2021. [doi]

Abstract

Abstract is missing.