The realization of ZrOxNy temperature sensors with good sensitivity and stability in the temperature range above 150K

Yanjie Li, Minmin You, Xun Gong, Xiu-Yan Li, Zude Lin, Jingquan Liu. The realization of ZrOxNy temperature sensors with good sensitivity and stability in the temperature range above 150K. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1165-1168, IEEE, 2021. [doi]

@inproceedings{LiYGLLL21,
  title = {The realization of ZrOxNy temperature sensors with good sensitivity and stability in the temperature range above 150K},
  author = {Yanjie Li and Minmin You and Xun Gong and Xiu-Yan Li and Zude Lin and Jingquan Liu},
  year = {2021},
  doi = {10.1109/NEMS51815.2021.9451523},
  url = {https://doi.org/10.1109/NEMS51815.2021.9451523},
  researchr = {https://researchr.org/publication/LiYGLLL21},
  cites = {0},
  citedby = {0},
  pages = {1165-1168},
  booktitle = {16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021},
  publisher = {IEEE},
  isbn = {978-1-6654-1941-3},
}