Yanjie Li, Minmin You, Xun Gong, Xiu-Yan Li, Zude Lin, Jingquan Liu. The realization of ZrOxNy temperature sensors with good sensitivity and stability in the temperature range above 150K. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1165-1168, IEEE, 2021. [doi]
Abstract is missing.