Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

Xinxin Li, Haitao Yu, Xiaohua Gan, Xiaoyuan Xia, Pengcheng Xu, Jungang Li, Min Liu, Yongxiang Li. Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection. J. Sensors, 2009, 2009. [doi]

Authors

Xinxin Li

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Haitao Yu

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Xiaohua Gan

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Xiaoyuan Xia

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Pengcheng Xu

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Jungang Li

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Min Liu

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Yongxiang Li

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