Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

Xinxin Li, Haitao Yu, Xiaohua Gan, Xiaoyuan Xia, Pengcheng Xu, Jungang Li, Min Liu, Yongxiang Li. Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection. J. Sensors, 2009, 2009. [doi]

@article{LiYGXXLLL09,
  title = {Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection},
  author = {Xinxin Li and Haitao Yu and Xiaohua Gan and Xiaoyuan Xia and Pengcheng Xu and Jungang Li and Min Liu and Yongxiang Li},
  year = {2009},
  doi = {10.1155/2009/637874},
  url = {http://dx.doi.org/10.1155/2009/637874},
  researchr = {https://researchr.org/publication/LiYGXXLLL09},
  cites = {0},
  citedby = {0},
  journal = {J. Sensors},
  volume = {2009},
}