An improved method to remove anti-footing Al layer after DRIE

Yuan Li, Zhenchuan Yang, Guizhen Yan. An improved method to remove anti-footing Al layer after DRIE. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 868-871, IEEE, 2009. [doi]

Abstract

Abstract is missing.