On the SRAM with comb-shaped nano FETs advancing to 3 nm node and beyond

Xinhao Li, Huilong Zhu, Zhenzhen Kong, Qi Wang 0041, Yongkui Zhang, Zhenhua Wu. On the SRAM with comb-shaped nano FETs advancing to 3 nm node and beyond. Microelectronics Journal, 138:105842, 2023. [doi]

Abstract

Abstract is missing.