Understanding ESD Induced Thermal Mechanism in FinFETs Through Predictive TCAD Simulation

Zhiqing Li, B. Zhu, A. Nath, M. Miao, A. Loiseau, Y. Li, J. B. Johnson, S. Mitra, R. Gauthier. Understanding ESD Induced Thermal Mechanism in FinFETs Through Predictive TCAD Simulation. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-4, IEEE, 2020. [doi]

Abstract

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