Capacitive micromachined ultrasonic transducer as a resonant temperature sensor

Zhikang Li, Libo Zhao, Zhiying Ye, Hongyan Wang, Yulong Zhao, Zhuangde Jiang. Capacitive micromachined ultrasonic transducer as a resonant temperature sensor. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1092-1095, IEEE, 2013. [doi]

Authors

Zhikang Li

This author has not been identified. Look up 'Zhikang Li' in Google

Libo Zhao

This author has not been identified. Look up 'Libo Zhao' in Google

Zhiying Ye

This author has not been identified. Look up 'Zhiying Ye' in Google

Hongyan Wang

This author has not been identified. Look up 'Hongyan Wang' in Google

Yulong Zhao

This author has not been identified. Look up 'Yulong Zhao' in Google

Zhuangde Jiang

This author has not been identified. Look up 'Zhuangde Jiang' in Google