Capacitive micromachined ultrasonic transducer as a resonant temperature sensor

Zhikang Li, Libo Zhao, Zhiying Ye, Hongyan Wang, Yulong Zhao, Zhuangde Jiang. Capacitive micromachined ultrasonic transducer as a resonant temperature sensor. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1092-1095, IEEE, 2013. [doi]

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