Zhikang Li, Libo Zhao, Zhiying Ye, Hongyan Wang, Yulong Zhao, Zhuangde Jiang. Capacitive micromachined ultrasonic transducer as a resonant temperature sensor. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1092-1095, IEEE, 2013. [doi]
@inproceedings{LiZYWZJ13,
title = {Capacitive micromachined ultrasonic transducer as a resonant temperature sensor},
author = {Zhikang Li and Libo Zhao and Zhiying Ye and Hongyan Wang and Yulong Zhao and Zhuangde Jiang},
year = {2013},
doi = {10.1109/NEMS.2013.6559912},
url = {http://dx.doi.org/10.1109/NEMS.2013.6559912},
researchr = {https://researchr.org/publication/LiZYWZJ13},
cites = {0},
citedby = {0},
pages = {1092-1095},
booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
publisher = {IEEE},
}