Self-healing LDMOSFET for high-voltage application on high-k/metal gate CMOS process

J. C. Liao, Paul Ko, M.-H. Hsieh, Zheng Zeng. Self-healing LDMOSFET for high-voltage application on high-k/metal gate CMOS process. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-3, IEEE, 2020. [doi]

Abstract

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