Interconnect fabrication processes and the development of low-cost wiring for CMOS products - researchr publication authors

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Thomas J. Licata, Evan G. Colgan, James M. E. Harper, Stephen E. Luce. Interconnect fabrication processes and the development of low-cost wiring for CMOS products. IBM Journal of Research and Development, 39(4):419-436, 1995.

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