Thomas J. Licata, Evan G. Colgan, James M. E. Harper, Stephen E. Luce. Interconnect fabrication processes and the development of low-cost wiring for CMOS products. IBM Journal of Research and Development, 39(4):419-436, 1995.
@article{LicataCHL95,
title = {Interconnect fabrication processes and the development of low-cost wiring for CMOS products},
author = {Thomas J. Licata and Evan G. Colgan and James M. E. Harper and Stephen E. Luce},
year = {1995},
tags = {e-science},
researchr = {https://researchr.org/publication/LicataCHL95},
cites = {0},
citedby = {0},
journal = {IBM Journal of Research and Development},
volume = {39},
number = {4},
pages = {419-436},
}