Reliability Characteristics of a High Density Metal- Insulator-Metal Capacitor on Intel's 10+ Process

C. Y. Lin, U. E. Avci, M. A. Blount, R. Grover, J. Hicks, R. Kasim, A. Kundu, C. M. Pelto, C. Ryder, Anthony Schmitz, K. Sethi, D. Seghete, D. J. Towner, A. J. Welsh, J. Weber, C. Auth. Reliability Characteristics of a High Density Metal- Insulator-Metal Capacitor on Intel's 10+ Process. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-4, IEEE, 2020. [doi]

Abstract

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