Doppler: DPL-aware and OPC-friendly gridless detailed routing with mask density balancing

Yen-Hung Lin, Yongchan Ban, David Z. Pan, Yih-Lang Li. Doppler: DPL-aware and OPC-friendly gridless detailed routing with mask density balancing. In 2011 IEEE/ACM International Conference on Computer-Aided Design (ICCAD), San Jose, California, USA, November 7-10, 2011. pages 283-289, IEEE, 2011. [doi]

Abstract

Abstract is missing.