Focus groups: impact of quality and process capability factors on the silicon wafer slicing process

Chin-Tsai Lin, Che-Wei Chang, Chie-Bein Chen. Focus groups: impact of quality and process capability factors on the silicon wafer slicing process. IJMTM, 6(1/2):171-184, 2004. [doi]

Authors

Chin-Tsai Lin

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Che-Wei Chang

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Chie-Bein Chen

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