Investigation of gate oxide short in FinFETs and the test methods for FinFET SRAMs

Chen-Wei Lin, Mango Chia-Tso Chao, Chih-Chieh Hsu. Investigation of gate oxide short in FinFETs and the test methods for FinFET SRAMs. In 31st IEEE VLSI Test Symposium, VTS 2013, Berkeley, CA, USA, April 29 - May 2, 2013. pages 1-6, IEEE Computer Society, 2013. [doi]

Authors

Chen-Wei Lin

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Mango Chia-Tso Chao

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Chih-Chieh Hsu

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