Investigation of gate oxide short in FinFETs and the test methods for FinFET SRAMs

Chen-Wei Lin, Mango Chia-Tso Chao, Chih-Chieh Hsu. Investigation of gate oxide short in FinFETs and the test methods for FinFET SRAMs. In 31st IEEE VLSI Test Symposium, VTS 2013, Berkeley, CA, USA, April 29 - May 2, 2013. pages 1-6, IEEE Computer Society, 2013. [doi]

@inproceedings{LinCH13,
  title = {Investigation of gate oxide short in FinFETs and the test methods for FinFET SRAMs},
  author = {Chen-Wei Lin and Mango Chia-Tso Chao and Chih-Chieh Hsu},
  year = {2013},
  doi = {10.1109/VTS.2013.6548929},
  url = {http://doi.ieeecomputersociety.org/10.1109/VTS.2013.6548929},
  researchr = {https://researchr.org/publication/LinCH13},
  cites = {0},
  citedby = {0},
  pages = {1-6},
  booktitle = {31st IEEE VLSI Test Symposium, VTS 2013, Berkeley, CA, USA, April 29 - May 2, 2013},
  publisher = {IEEE Computer Society},
  isbn = {978-1-4673-5542-1},
}