A novel fuzzy matching model for lithography hotspot detection

Sheng-Yuan Lin, Jing-Yi Chen, Jin-Cheng Li, Wan-yu Wen, Shih-Chieh Chang. A novel fuzzy matching model for lithography hotspot detection. In The 50th Annual Design Automation Conference 2013, DAC '13, Austin, TX, USA, May 29 - June 07, 2013. pages 68, ACM, 2013. [doi]

Abstract

Abstract is missing.