Phase and Carrier Polarity Control of Sputtered MoTe2 by Plasma-induced Defect Engineering

Chih-Pin Lin, Hao-Hua Hsu, Tuo-Hung Hou. Phase and Carrier Polarity Control of Sputtered MoTe2 by Plasma-induced Defect Engineering. In 2020 Device Research Conference, DRC 2020, Columbus, OH, USA, June 21-24, 2020. pages 1-2, IEEE, 2020. [doi]

Abstract

Abstract is missing.