Meng-Hu Lin, Shao-Kang Hung, Sheng-Chih Huang, Li-Chen Fu. Measuring the Deflection of the Cantilever in Atomic Force Microscope with an Optical Pickup System. In 45th IEEE Conference on Decision and Control, CDC 2006, San Diego, CA, USA, 13-15 December, 2006. pages 592-596, IEEE, 2006. [doi]
Abstract is missing.