Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Kuo-Yi Lin, Chia-Yu Hsu, Hui-Chun Yu. A virtual metrology approach for maintenance compensation to improve yield in semiconductor manufacturing. Int. J. Computational Intelligence Systems, 7(sup2):66-73, 2014. [doi]
Abstract is missing.