Lithography Hotspot Detection via Heterogeneous Federated Learning with Local Adaptation

Xuezhong Lin, Jingyu Pan, Jinming Xu 0002, Yiran Chen, Cheng Zhuo. Lithography Hotspot Detection via Heterogeneous Federated Learning with Local Adaptation. In 27th Asia and South Pacific Design Automation Conference, ASP-DAC 2022, Taipei, Taiwan, January 17-20, 2022. pages 166-171, IEEE, 2022. [doi]

Abstract

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