James Lin, Long Pham, Ran Tao, A. Gutmann, Shanglin Guo, Adam Cywar, Adam Spirer, Johan Mansson, Khiem Nguyen. A Low-Power, Wide-Bandwidth, Three-Axis MEMS Accelerometer ASIC Using Beyond-Resonant-Frequency Sensing. J. Solid-State Circuits, 59(3):774-783, March 2024. [doi]
Abstract is missing.