Combined Model-Free Decoupling Control and Double Resonant Control in Parallel Nanopositioning Stages for Fast and Precise Raster Scanning

Jie Ling, Zhao Feng, Min Ming, Xiaohui Xiao. Combined Model-Free Decoupling Control and Double Resonant Control in Parallel Nanopositioning Stages for Fast and Precise Raster Scanning. In Naoyuki Kubota, Kazuo Kiguchi, Honghai Liu, Takenori Obo, editors, Intelligent Robotics and Applications - 9th International Conference, ICIRA 2016, Tokyo, Japan, August 22-24, 2016, Proceedings, Part I. Volume 9834 of Lecture Notes in Computer Science, pages 51-62, Springer, 2016. [doi]

Abstract

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