Chi-Yuan Liu, Hui-Ju Katherine Chiang, Yao-Wen Chang, Jie-Hong R. Jiang. Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification. In The 51st Annual Design Automation Conference 2014, DAC '14, San Francisco, CA, USA, June 1-5, 2014. pages 1-6, ACM, 2014. [doi]
@inproceedings{LiuCCJ14,
title = {Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification},
author = {Chi-Yuan Liu and Hui-Ju Katherine Chiang and Yao-Wen Chang and Jie-Hong R. Jiang},
year = {2014},
doi = {10.1145/2593069.2593215},
url = {http://doi.acm.org/10.1145/2593069.2593215},
researchr = {https://researchr.org/publication/LiuCCJ14},
cites = {0},
citedby = {0},
pages = {1-6},
booktitle = {The 51st Annual Design Automation Conference 2014, DAC '14, San Francisco, CA, USA, June 1-5, 2014},
publisher = {ACM},
isbn = {978-1-4503-2730-5},
}