Yi-Lin Liu, Kuan-Wei Huang, Ching-Chi Huang, Huang-Chih Chen, Li-Chen Fu. AFM Tip Localization on Large Range Sample Using Particle Filter for MEMS Inspection. In 2020 American Control Conference, ACC 2020, Denver, CO, USA, July 1-3, 2020. pages 577-582, IEEE, 2020. [doi]
Abstract is missing.