Variation of thermal stress in TSV structures caused by crystallinity of electroplated copper interconnections

Jiatong Liu, Ken Suzuki, Hideo Miura. Variation of thermal stress in TSV structures caused by crystallinity of electroplated copper interconnections. In 2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015. IEEE, 2015. [doi]

Abstract

Abstract is missing.