Investigation of performance dependence on transduction diaphragm design for piezoelectric micromachined ultrasonic transducers

Chongbin Liu, Xiangyang Wang, Guoqiang Wu. Investigation of performance dependence on transduction diaphragm design for piezoelectric micromachined ultrasonic transducers. Microelectronics Journal, 150:106260, 2024. [doi]

Abstract

Abstract is missing.