Internal profile reconstruction for MEMS microstructures based on infrared transmission technology - researchr publication authors

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Yi Liu, Chenyang Xue, Xiujian Chou, Kangkang Niu, Jun Liu. Internal profile reconstruction for MEMS microstructures based on infrared transmission technology. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1029-1032, IEEE, 2010. [doi]

This author has not been identified. Look up 'Yi Liu' in GoogleThis author has not been identified. Look up 'Chenyang Xue' in GoogleThis author has not been identified. Look up 'Xiujian Chou' in GoogleThis author has not been identified. Look up 'Kangkang Niu' in GoogleThis author has not been identified. Look up 'Jun Liu' in Google

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