Yi Liu, Chenyang Xue, Xiujian Chou, Kangkang Niu, Jun Liu. Internal profile reconstruction for MEMS microstructures based on infrared transmission technology. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1029-1032, IEEE, 2010. [doi]
Abstract is missing.