Yi Liu, Chenyang Xue, Xiujian Chou, Kangkang Niu, Jun Liu. Internal profile reconstruction for MEMS microstructures based on infrared transmission technology. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1029-1032, IEEE, 2010. [doi]
@inproceedings{LiuXCNL10, title = {Internal profile reconstruction for MEMS microstructures based on infrared transmission technology}, author = {Yi Liu and Chenyang Xue and Xiujian Chou and Kangkang Niu and Jun Liu}, year = {2010}, doi = {10.1109/NEMS.2010.5592581}, url = {http://dx.doi.org/10.1109/NEMS.2010.5592581}, researchr = {https://researchr.org/publication/LiuXCNL10}, cites = {0}, citedby = {0}, pages = {1029-1032}, booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010}, publisher = {IEEE}, }