Study of the Mechanical Stress Impact on Silicide Contact Resistance by 4-Point Bending - researchr publication authors

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Yefan Liu, Hao Yu, Gaspard Hiblot, Anastasiia Kruv, Marc Schaekers, Naoto Horiguchi, Dimitrios Velenis, Ingrid De Wolf. Study of the Mechanical Stress Impact on Silicide Contact Resistance by 4-Point Bending. In IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019. pages 1-5, IEEE, 2019. [doi]

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