Study of the Mechanical Stress Impact on Silicide Contact Resistance by 4-Point Bending

Yefan Liu, Hao Yu, Gaspard Hiblot, Anastasiia Kruv, Marc Schaekers, Naoto Horiguchi, Dimitrios Velenis, Ingrid De Wolf. Study of the Mechanical Stress Impact on Silicide Contact Resistance by 4-Point Bending. In IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019. pages 1-5, IEEE, 2019. [doi]

@inproceedings{LiuYHKSHVW19,
  title = {Study of the Mechanical Stress Impact on Silicide Contact Resistance by 4-Point Bending},
  author = {Yefan Liu and Hao Yu and Gaspard Hiblot and Anastasiia Kruv and Marc Schaekers and Naoto Horiguchi and Dimitrios Velenis and Ingrid De Wolf},
  year = {2019},
  doi = {10.1109/IRPS.2019.8720416},
  url = {https://doi.org/10.1109/IRPS.2019.8720416},
  researchr = {https://researchr.org/publication/LiuYHKSHVW19},
  cites = {0},
  citedby = {0},
  pages = {1-5},
  booktitle = {IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019},
  publisher = {IEEE},
  isbn = {978-1-5386-9504-3},
}