Thermal-sensitive BST thin film capacitors for dielectric bolometer prepared by RF magnetron sputtering

Shi-Jian Liu, Xiang-Bin Zeng, Jun-Hao Chu. Thermal-sensitive BST thin film capacitors for dielectric bolometer prepared by RF magnetron sputtering. Microelectronics Journal, 35(7):601-603, 2004. [doi]

Abstract

Abstract is missing.