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Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor

Mingyang Lu, Liming Chen, Xiaobai Meng, Ruochen Huang, Anthony J. Peyton, Wuliang Yin. Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor. IEEE T. Instrumentation and Measurement, 70:1-8, 2021. [doi]

Authors

Mingyang Lu

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Liming Chen

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Xiaobai Meng

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Ruochen Huang

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Anthony J. Peyton

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Wuliang Yin

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