Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor

Mingyang Lu, Liming Chen, Xiaobai Meng, Ruochen Huang, Anthony J. Peyton, Wuliang Yin. Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor. IEEE T. Instrumentation and Measurement, 70:1-8, 2021. [doi]

@article{LuCMHPY21,
  title = {Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor},
  author = {Mingyang Lu and Liming Chen and Xiaobai Meng and Ruochen Huang and Anthony J. Peyton and Wuliang Yin},
  year = {2021},
  doi = {10.1109/TIM.2020.3027929},
  url = {https://doi.org/10.1109/TIM.2020.3027929},
  researchr = {https://researchr.org/publication/LuCMHPY21},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {70},
  pages = {1-8},
}