Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor

Mingyang Lu, Liming Chen, Xiaobai Meng, Ruochen Huang, Anthony J. Peyton, Wuliang Yin. Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor. IEEE T. Instrumentation and Measurement, 70:1-8, 2021. [doi]

Abstract

Abstract is missing.