XRR and FE-SEM studies of nano-multi-layer ceramic thin films with periodic structures - researchr publication authors

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Jong-Hong Lu, Bo-Ying Chen, Hua-Chung Tzou. XRR and FE-SEM studies of nano-multi-layer ceramic thin films with periodic structures. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 45-48, IEEE, 2011. [doi]

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