XRR and FE-SEM studies of nano-multi-layer ceramic thin films with periodic structures

Jong-Hong Lu, Bo-Ying Chen, Hua-Chung Tzou. XRR and FE-SEM studies of nano-multi-layer ceramic thin films with periodic structures. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 45-48, IEEE, 2011. [doi]

@inproceedings{LuCT11-1,
  title = {XRR and FE-SEM studies of nano-multi-layer ceramic thin films with periodic structures},
  author = {Jong-Hong Lu and Bo-Ying Chen and Hua-Chung Tzou},
  year = {2011},
  doi = {10.1109/NEMS.2011.6017291},
  url = {http://dx.doi.org/10.1109/NEMS.2011.6017291},
  researchr = {https://researchr.org/publication/LuCT11-1},
  cites = {0},
  citedby = {0},
  pages = {45-48},
  booktitle = {6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  publisher = {IEEE},
}