XRR and FE-SEM studies of nano-multi-layer ceramic thin films with periodic structures

Jong-Hong Lu, Bo-Ying Chen, Hua-Chung Tzou. XRR and FE-SEM studies of nano-multi-layer ceramic thin films with periodic structures. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 45-48, IEEE, 2011. [doi]

Abstract

Abstract is missing.