A monolithic surface micromachined accelerometer with digital output

Crist Lu, Mark Lemkin, Bernhard E. Boser. A monolithic surface micromachined accelerometer with digital output. J. Solid-State Circuits, 30(12):1367-1373, December 1995. [doi]

Authors

Crist Lu

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Mark Lemkin

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Bernhard E. Boser

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