Crist Lu, Mark Lemkin, Bernhard E. Boser. A monolithic surface micromachined accelerometer with digital output. J. Solid-State Circuits, 30(12):1367-1373, December 1995. [doi]
@article{LuLB95,
title = {A monolithic surface micromachined accelerometer with digital output},
author = {Crist Lu and Mark Lemkin and Bernhard E. Boser},
year = {1995},
month = {December},
doi = {10.1109/4.482163},
url = {https://doi.org/10.1109/4.482163},
researchr = {https://researchr.org/publication/LuLB95},
cites = {0},
citedby = {0},
journal = {J. Solid-State Circuits},
volume = {30},
number = {12},
pages = {1367-1373},
}