Xuebin Lu, Xiaowei Liu, Rongyan Chuai, Changzhi Shi, Mingxue Huo, Weiping Chen. Piezoresistive properties of heavily doped P-type polysilicon films. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 498-501, IEEE, 2009. [doi]
Abstract is missing.