Novel Selective Area Recessed Regrowth-free Ohmic Contacts to High Al-content Barrier

Hao Lu, Xiaohua Ma, Bin Hou, Ling Yang 0003, Teng Huo, Zeyan Si, Yue Hao. Novel Selective Area Recessed Regrowth-free Ohmic Contacts to High Al-content Barrier. In 2021 IEEE International Conference on Integrated Circuits, Technologies and Applications, ICTA 2021, Zhuhai, China, November 24-26, 2021. pages 78-79, IEEE, 2021. [doi]

Abstract

Abstract is missing.