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Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net

Yanjun Lu, Yan Qiao, Chunrong Pan, Yufeng Chen, Naiqi Wu, Zhiwu Li, Bin Liu. Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net. IEEE Access, 9:70868-70883, 2021. [doi]

Authors

Yanjun Lu

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Yan Qiao

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Chunrong Pan

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Yufeng Chen

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Naiqi Wu

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Zhiwu Li

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Bin Liu

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