Yanjun Lu, Yan Qiao, Chunrong Pan, Yufeng Chen, Naiqi Wu, Zhiwu Li, Bin Liu. Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net. IEEE Access, 9:70868-70883, 2021. [doi]
@article{LuQPCWLL21,
title = {Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net},
author = {Yanjun Lu and Yan Qiao and Chunrong Pan and Yufeng Chen and Naiqi Wu and Zhiwu Li and Bin Liu},
year = {2021},
doi = {10.1109/ACCESS.2021.3077503},
url = {https://doi.org/10.1109/ACCESS.2021.3077503},
researchr = {https://researchr.org/publication/LuQPCWLL21},
cites = {0},
citedby = {0},
journal = {IEEE Access},
volume = {9},
pages = {70868-70883},
}