S. L. Lung, Dennis Lin, S. S. Chen, Gary Weng, C. L. Liu, S. C. Lai, C.-W. Tsai, T. B. Wu, Rich Liu. Modularized low temperature LNO/PZT/LNO ferroelectric capacitor-over-interconnect (COI) FeRAM for advanced SOC (ASOC) application. In Proceedings of the IEEE 2002 Custom Integrated Circuits Conference, CICC 2002, Orlando, FL, USA, May 12-15, 2002. pages 479-482, IEEE, 2002. [doi]
Abstract is missing.